3DHALL 3-Axis Hall Magnetic Sensor

The SENM3Dx is a CMOS magnetic field sensor that allows the acquisition of all three magnetic-field components (Bx, By and Bz) at the same time and at the same spot. The sensor incorporates three groups of mutually orthogonal Hall-effect elements (one horizontal and two vertical) with biasing circuits and amplifiers for each of them. The integrated Hall elements are very compact and occupy a small area of about 100 x 100 μm2. This allows for very high spatial resolution of the sensor. The applied CMOS technology enables high precision in the fabrication of the vertical and horizontal Hall elements, which gives high angular accuracy (orthogonality) of the three-measurement axis. The application of the spinning-current technique in the biasing of the Hall elements significantly suppresses offset, low-frequency noise, and the planar Hall effect. The sensor provides high analog bandwidth from DC to 300kHz. A built-in temperature sensor allows to measure the current chip temperature at the field sensitive volume.

The SENM3Dx Evaluation Kit is designed for evaluation of the real 3-axis magnetic field sensor which is a CMOS integrated device that allows the vectorial measurement of the three magnetic flux components Bx, By and Bz in a field sensitive volume (FSV) of 100 x 100 x 10 µm3. The FSV is about 0.75 mm below the surface of the chip package. Please read the data sheet of SENM3Dx for details. In order to allow users to run and test sensors quickly, the kit consists of a board (PCB) with a SENM3Dx sensor mounted on it, a control box to communicate and configure, as well as the cable and power supply (Table 1). There is a green LED on the PCB to indicate if the sensor is powered.